Live feed17:05:04·29dINSIDERFilingvia QuantisnowPRESIDENT AND CEO Low Russell was granted 38,932 shares and covered exercise/tax liability with 6,891 shares, increasing direct ownership by 26% to 155,611 units (SEC Form 4) to cover withholding taxByQuantisnow·Wall Street's wire, on your screen.ACLS· Axcelis Technologies Inc.TechnologyOriginal source